JPH0262650U - - Google Patents

Info

Publication number
JPH0262650U
JPH0262650U JP14312988U JP14312988U JPH0262650U JP H0262650 U JPH0262650 U JP H0262650U JP 14312988 U JP14312988 U JP 14312988U JP 14312988 U JP14312988 U JP 14312988U JP H0262650 U JPH0262650 U JP H0262650U
Authority
JP
Japan
Prior art keywords
ion source
mesh
source chamber
microwave
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14312988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14312988U priority Critical patent/JPH0262650U/ja
Publication of JPH0262650U publication Critical patent/JPH0262650U/ja
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)
JP14312988U 1988-10-31 1988-10-31 Pending JPH0262650U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14312988U JPH0262650U (en]) 1988-10-31 1988-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14312988U JPH0262650U (en]) 1988-10-31 1988-10-31

Publications (1)

Publication Number Publication Date
JPH0262650U true JPH0262650U (en]) 1990-05-10

Family

ID=31409675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14312988U Pending JPH0262650U (en]) 1988-10-31 1988-10-31

Country Status (1)

Country Link
JP (1) JPH0262650U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5458427B1 (ja) * 2013-05-27 2014-04-02 株式会社アドテック プラズマ テクノロジー マイクロ波プラズマ発生装置の空洞共振器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5458427B1 (ja) * 2013-05-27 2014-04-02 株式会社アドテック プラズマ テクノロジー マイクロ波プラズマ発生装置の空洞共振器
WO2014192062A1 (ja) * 2013-05-27 2014-12-04 株式会社アドテック プラズマ テクノロジー マイクロ波プラズマ発生装置の空洞共振器

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